Park FX300 is Park Systems’ latest innovation in atomic force microscopy (AFM), designed to accommodate samples up to 300 mm. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX300 delivers unmatched precision and reliability.

Like all Park AFMs, FX300 features an orthogonal scan system and True Non-contact™ mode, enabling accurate, high-resolution metrology, even on the most delicate or fragile samples.

Key features of FX300 include automatic probe exchange and automatic laser beam alignment; the signatures of FX-series AFMs that streamline operation and enhance productivity. Automated AFM scan parameter settings, sequential measurements across multiple coordinates, and powerful data analysis further simplify complex workflows.

With advanced capabilities and upgraded safety features, the FX300 offers a versatile solution for nanoscale imaging and analysis across both research and industrial settings. 

Key Features

Superior FX Mechanical Design

The FX-series AFMs are designed for minimal mechanical noise. The optical microscope is decoupled from the Z stage, lowering the weight on the Z stage and thus reducing susceptibility to mechanical disturbances. The Z stage itself is built more robustly with a high-stiffness cross-roller guide and two bearing blocks.

A wide trapezoidal strut reinforces the mechanical rigidity of the FX300, while the use of expansion-matched materials with low thermal expansion coefficients mitigates thermal drift, ensuring reliable performance over time.

FX Laser Beam Path

The FX optics structure integrates a fiber-coupled laser (superluminescent diode; SLD) into the optical microscope assembly. The laser beam is focused through the objective lens and remains fixed at the center of the optical field of view.

Automatic Laser Beam Alignment

The vision-guided alignment system detects the cantilever shape and position and then moves the optics XY stage to align the cantilever at the center of the field of view, precisely where the laser beam is focused. Two precision motors in the FX scan head adjust the steering mirror to align the laser beam in the center of the position-sensitive photodetector (PSPD).

Automated laser beam alignment combined with automatic PSPD centering reduces setup time, ensures consistent alignment, and makes operation smooth for both new and experienced users.

Automatic Probe Exchange

AFM probe exchange can be challenging, even for experienced users, and can often lead to cantilever breakage, increasing setup time and consumable costs. Park AFMs address this difficulty by using pre-aligned probe chip carriers with kinematic mounting points for reliable and consistent tip positioning.

Each chip carrier is marked with a QR code containing detailed information, including probe type, serial number, date manufactured, and specifications.

The FX head’s Z scanner features three precision ball seats for kinematic mounting, complemented by magnets at the base to ensure a secure, reliable, and repeatable mounting position.

The automatic tip exchanger (ATX) module stores up to 16 pre-mounted probes. After the ATX camera scans the probes' QR codes, the SmartScan™ AFM operating software displays probe information for each slot, allowing the user to select full or vacant probe slots with a simple mouse click.

After a slot is selected, the AFM head moves down to pick the probe up from or park the currently mounted probe into the slot, depending on the position of the strong magnet underneath.

Safety and Facility Features

FX300 includes essential safety features for industrial environments. The facility controller ensures centralized system management. Equipped with a photo ionizer with signal light, static charges on the sample can be controlled effectively.

The emergency machine off (EMO) button enables immediate system shutdown. The signal tower with a buzzer provides clear visual and audible status alerts. Additionally, an optional fan filter unit can maintain air purity for sensitive operations.

Improved On-Axis Optics

The unobstructed optical microscope provides a clear field of view and can resolve line widths down to 0.87 μm.

Park AFM Technology

Orthogonal Scan System

Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. FX300, like all Park AFMs, employs an advanced orthogonal scan system featuring a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe’s Z-axis motion. This separated scanner system ensures highly orthogonal, linear scans with minimal out-of-plane motion and fast dynamic performance. Equipped with low-noise optical sensors for XY feedback and an ultra-low-noise strain gauge sensor for Z control, a closed-loop servo control system ensures precise and repeatable scanning across all axes.

For large samples, a single-servo XY scan architecture can be vulnerable to the rotational motion of the sample chuck. This rotational motion can introduce positioning errors that increase with distance from the position sensor.

The FX300 resolves this issue with a dual-servo XY scanner architecture, with two pairs of actuators and position sensors mounted on opposite sides of each axis. All four actuators are controlled independently to ensure accurate positioning across the entire 300 × 300 mm² sample area.

Park AFM Technology

True Non-Contact™ Mode

FX300 features True Non-contact™ mode, a proprietary technology exclusively offered by Park Systems. True Non-contact mode obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface.

Park NX20 is a flagship atomic force microscope (AFM) designed for large-sample research, delivering unmatched accuracy, reliability, and ease of use. As Park Systems’ original 200 mm sample AFM, it has earned global recognition in both academic and industrial laboratories for producing precise, repeatable nanoscale measurements.​

At the core of NX20 are Park Systems’ proprietary orthogonal scan system and True Non-contact™ mode, innovations that virtually eliminate lateral motion artifacts while protecting both tip and sample. Together, these technologies ensure artifact-free, high-resolution imaging even for the most delicate or challenging samples.​ 

Key Features

Outstanding NX Mechanical Design​

The NX20 features a direct on-axis optical microscope with integrated LED illumination, providing real-time vision of both the probe and sample. A vertically aligned, motorized Z stage and focus stage—software-controlled for automatic tip-to-sample approach—ensure precision and ease of use. The slide-to-connect AFM head with dove-tail rail allows quick setup, while an expansion slot supports advanced AFM modes and options. A motorized XY sample stage enables convenient navigation and sequential measurements across multiple coordinates, with a fine step resolution of 0.6 μm.

Fast Z Servo and High Resolution

The resolution of the images in Park NX series has been further enhanced. The NX Z scanner, built with a stacked piezo actuator and a strain gauge sensor, delivers fast and precise measurements across a wide range of surfaces. From extremely flat to rough samples, it maintains consistent roughness linearity regardless of scan size, ensuring reliable results in any measurement.

NX Laser Beam Path

The NX head integrates a superluminescent diode that provides low coherence illumination, minimizing interference for stable signal detection. The laser beam is guided through precision mirrors to the cantilever and position-sensitive photodetector (PSPD), ensuring accurate signal alignment.

The knobs move the laser beam directly along the X and Y axes, allowing intuitive adjustment of the beam position and effortless realignment during probe replacement.

Pre-Mounted Probe

AFM probe exchange can be challenging, even for experienced users, often resulting in cantilever breakage. Park AFM addresses this by using pre-aligned probe chip carriers with kinematic mounting points, ensuring reliable and consistent tip positioning.

The NX head Z scanner features three precision balls for kinematic mounting, complemented by magnets at the base to ensure a secure, reliable, and repeatable mounting position.

Improved Z Scan Straightness

Park NX series Z scanner maintains straightness within 0.1% across the usable range, with out-of-axis motion under 5 nm even at a full 15 µm extension. ​

Its compact assembly, combining a preload spring, kinematic pin, and piezo actuator, minimizes drift and ensures accurate vertical motion for reliable, distortion-free nanoscale measurements.

Simple Expansion Slot for Modes and Options

Simply plug an option module into the expansion slot to enable advanced AFM modes. Park NX series AFM features a modular design, ensuring compatibility with options across its product line.

On-Axis Optical Microscope

The high-power on-axis optical microscope provides a clear view of the sample surface. A software-controlled LED light source illuminates the sample surface for better observation.

Park AFM Technology

Orthogonal Scan System

Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. NX20, like all Park AFMs, employs an advanced orthogonal scan system featuring a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe’s Z-axis motion. This separated scanner system ensures highly orthogonal, linear scans with minimal out-of-plane motion and fast dynamic performance.

For large samples, a single-servo XY scan architecture can be vulnerable to the rotational motion of the sample chuck. This rotational motion can introduce positioning errors that increase with distance from the position sensor.

NX20 resolves this issue with a dual-servo XY scanner architecture, with two pairs of actuators and position sensors mounted on opposite sides of each axis. All four actuators are controlled independently to ensure accurate positioning across the entire 200 × 200 mm² sample area.

Park AFM Technology

True Non-Contact™ Mode

NX20 features True Non-contact™ mode, a proprietary technology exclusively offered by Park Systems. True Non-contact mode obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface.

Park FX40 is Park Systems’ latest innovation in atomic force microscopy (AFM), designed for high-resolution imaging of small samples. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX40 delivers unmatched precision and reliability.

Like all Park AFMs, FX40 features an orthogonal scan system and True Non-contact™ mode, enabling accurate, high-resolution metrology, even on the most delicate or fragile samples.​

Key features of FX40 include automatic probe exchange, automatic laser beam alignment, and a sample-view camera; the signatures of FX-series AFMs that streamline operation while significantly enhancing productivity. With the powerful FX AFM controller featuring an 8-channel lock-in amplifier and 5 MHz bandwidth for advanced signal processing, FX40 supports a wide range of cutting-edge modes and options.

Built for both precision and ease of use, the FX40 is the ideal solution for nanoscale imaging and analysis. 

Key Features

Superior FX Mechanical Design

The FX-series AFMs are designed for minimal mechanical noise. The optical microscope is decoupled from the Z stage, lowering the weight on the Z stage and thus reducing susceptibility to mechanical disturbances. The Z stage itself is built more robustly with a high-stiffness cross-roller guide and two bearing blocks.​

Constructed with materials of low thermal expansion coefficients mitigates thermal drift, the FX40 delivers reliable performance over time.

FX Laser Beam Path

The FX optics structure integrates a fiber-coupled laser (superluminescent diode; SLD) into the optical microscope assembly. The laser beam is focused through the objective lens and remains fixed at the center of the optical field of view.

Automatic Laser Beam Alignment

The vision-guided alignment system detects the cantilever shape and position and then moves the optics XY stage to align the cantilever at the center of the field of view, precisely where the laser beam is focused. Two precision motors in the FX scan head adjust the steering mirror to align the laser beam in the center of the position-sensitive photodetector (PSPD).

Automated laser beam alignment combined with automatic PSPD centering reduces setup time, ensures consistent alignment, and makes operation smooth for both new and experienced users.

Automatic Probe Exchange

AFM probe exchange can be challenging, even for experienced users, and can often lead to cantilever breakage, increasing setup time and consumable costs. Park AFMs address this difficulty by using pre-aligned probe chip carriers with kinematic mounting points for reliable and consistent tip positioning.

Each chip carrier is marked with a QR code containing detailed information, including probe type, serial number, date manufactured, and specifications.

The FX head’s Z scanner features three precision ball seats for kinematic mounting, complemented by magnets at the base to ensure a secure, reliable, and repeatable mounting position.

The automatic tip exchanger (ATX) module stores up to 8 pre-mounted probes. After the ATX camera scans the probes' QR codes, the SmartScan™ AFM operating software displays probe information for each slot, allowing the user to select full or vacant probe slots with a simple mouse click.

After a slot is selected, the AFM head moves down to pick the probe up from or park the currently mounted probe into the slot, depending on the position of the strong magnet underneath.

Sample-View Camera

The sample-view camera provides a captured image of the sample, allowing users to simply point and click to move the XY stage. This enables convenient navigation to areas of interest and easy return to the same location.

Improved On-Axis Optics

The unobstructed optical microscope provides a clear field of view and can resolve line widths down to 0.87 μm.

Park AFM Technology

Orthogonal Scan System

Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. FX40, like all Park AFMs, employs an advanced orthogonal scan system featuring a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe’s Z-axis motion. This separated scanner system ensures highly orthogonal, linear scans with minimal out-of-plane motion and fast dynamic performance. Equipped with low-noise optical sensors for XY feedback and an ultra-low-noise strain gauge sensor for Z control, a closed-loop servo control system ensures precise and repeatable scanning across all axes.

The XY scanner is designed to achieve flat, purely horizontal motion without vertical interference by using stacked piezo actuators and flexure hinge structures. A position sensor is located at the center of the scanner to provide direct feedback for servo control, minimizing positioning errors across the scan area. This design ensures consistent accuracy and stability, even when scanning large samples.

Park AFM Technology

True Non-Contact™ Mode

FX40 features True Non-contact™ mode, a proprietary technology exclusively offered by Park Systems. True Non-contact mode obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface.

Park NX10 is a flagship atomic force microscope (AFM) designed for small-sample research, delivering unmatched accuracy, reliability, and ease of use. As Park Systems’ original small-sample AFM, it has earned global recognition in both academic and industrial laboratories for producing precise, repeatable nanoscale measurements.

At the core of the NX10 are Park’s proprietary orthogonal scan system and True Non-contact™ mode, innovations that virtually eliminate lateral motion artifacts while protecting both tip and sample. Together, these technologies ensure artifact-free, high-resolution imaging even for the most delicate or challenging samples.

From materials science to polymers and bioengineering, NX10 delivers robust performance and dependable results, making it a trusted platform for advanced nanoscale metrology. 

Key Features

Outstanding NX Mechanical Design​

NX10 is built around improved XY and Z scanner performance. This includes fast Z-servo speed, which gives quick vertical response, and improved Z scan straightness for accurate imaging. In addition, the XY scanner ensures precise positioning during scans.​

Another highlight is the low Z detector noise. Thanks to the stacked piezo actuator and strain gauge sensor, the NX provides both high precision and exceptionally low noise levels, which are critical for reliable measurements. Together, these features make the NX series a robust and precise platform for advanced AFM research.​

Fast Z Servo and High Resolution

The resolution of the images in Park NX series has been further enhanced. The NX Z scanner, built with a stacked piezo actuator and a strain gauge sensor, delivers fast and precise measurements across a wide range of surfaces. From extremely flat to rough samples, it maintains consistent roughness linearity regardless of scan size, ensuring reliable results in any measurement.

NX Laser Beam Path

The NX head integrates a superluminescent diode that provides low coherence illumination, minimizing interference for stable signal detection. The laser beam is guided through precision mirrors to the cantilever and position-sensitive photodetector (PSPD), ensuring accurate signal alignment.

The knobs move the laser beam directly along the X and Y axes, allowing intuitive adjustment of the beam position and effortless realignment during probe replacement.

Pre-Mounted Probe

AFM probe exchange can be challenging, even for experienced users, often resulting in cantilever breakage. Park AFM addresses this by using pre-aligned probe chip carriers with kinematic mounting points, ensuring reliable and consistent tip positioning.

The NX head Z scanner features three precision balls for kinematic mounting, complemented by magnets at the base to ensure a secure, reliable, and repeatable mounting position.

Improved Z Scan Straightness

Park NX series Z scanner maintains straightness within 0.1% across the usable range, with out-of-axis motion under 5 nm even at a full 15 µm extension. ​

Its compact assembly, combining a preload spring, kinematic pin, and piezo actuator, minimizes drift and ensures accurate vertical motion for reliable, distortion-free nanoscale measurements.

Simple Expansion Slot for Modes and Options

Simply plug an option module into the expansion slot to enable advanced AFM modes. Park NX series AFM features a modular design, ensuring compatibility with options across its product line.

On-Axis Optical Microscope

The high-power on-axis optical microscope provides a clear view of the sample surface. A software-controlled LED light source illuminates the sample surface for better observation.

Park AFM Technology

Orthogonal Scan System

Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. NX10, like all Park AFMs, employs an advanced orthogonal scan system featuring a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe’s Z-axis motion. This separated scanner system ensures highly orthogonal, linear scans with minimal out-of-plane motion and fast dynamic performance.

The XY scanner is designed to achieve flat, purely horizontal motion without vertical interference by using stacked piezo actuators and  flexure hinge structures. A position sensor is located at the center of  the scanner to provide direct feedback for servo control, minimizing  positioning errors across the scan area. This design ensures consistent accuracy and stability, even when scanning large samples. 

Park AFM Technology

True Non-Contact™ Mode

NX10 features True Non-contact™ mode, a proprietary technology exclusively offered by Park Systems. True Non-contact mode obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface.